[7] Fabrication technology of ultraprecise mirror optics to realize hard x-ray nanobeam
Kazuto Yamauchi, Kazuya Yamamura, Hidekazu Mimura, Yasuhisa Sano, Satoshi Matsuyama, Hirokatsu Yumoto, Kazumasa Ueno, Masafumi Shibahara, Katsuyoshi Endo, Makina Yabashi, Kenji Tamasaku,
Yoshinori Nishino, Tetsuya Ishikawa, and Yuzo Mori
SPIE Annual Meeting 2004, Advances in Mirror Technology for X-ray, EUV Lithography, Laser, and Other Applications II, Denver, USA, August 5, 2004.
Proceedings of SPIE 5533, 116-123 (2004).